GaSonics PEP 4800DL Iridia

GaSonics PEP 4800DL Iridia

Contact us for price

orCall +353 (0) 87 192 1110

Description

GaSonics PEP 4800DL Iridia

Gasonics dual chamber etcher used to independently

deskin (remove a crusted layer of photoresist without

penetrating a lower layer of conventional photoresist) or

to independently remove photoresist. Tool can also be

used in a two step process: deskin a wafer and in a

second step perform a conventional as removal. The tool

operates while simultaneously producing microwave

energy and rf energy.

Specifications

ManufacturerGasonics
ModelPEP-4800DL(L)
Year1998
ConditionUsed
Stock NumberGOD18012016-019