Karl Suss MA24 Mask Aligner

Karl Suss MA24 Mask Aligner

Karl Suss MA24 mask aligner configured for

simultaneous double side exposure and cassette to

cassette handling of 4" wafers.

Tool is equipped with diffraction reducing optical

systems and 350W HBO lamps.

Tool features choice of bright field and dark field

illumination, an alignment accuracy between upper

and lower side of the wafer of <2 microns, and

alignment table rotation of <2 degrees.