GCA ULTRATECH XLS 7800 248nm DUV Stepper
GCA ULTRATECH XLS 7800 248nm DUV Stepper
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Description
GCA ULTRATECH XLS 7800 248nm DUV Stepper
GCA Ultratech XLS 7800 full field (22 squared mm), NA=0.51, 4X
reduction step and repeat exposure tool using a 248nm laser
source.
Specifications
Manufacturer | GCA |
Model | cxlattm01duv |
Year | 1992 |
Condition | Used |
Stock Number | GOD18012016-010 |