SemiTherm VTP 1500 LH LPCVD Reactor (SiN)

SemiTherm VTP 1500 LH LPCVD Reactor (SiN)

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Description

SemiTherm VTP 1500 LH LPCVD Reactor (SiN)


SemiTherm VTP 1500 LH LPCVD (SiN) Reactor is

configured for SiN processing of 200 mm wafers. System

is fully automated with cassette to cassette handling and

offers high throughput.

Specifications

ManufacturerSemiTherm
ModelVTP-1500-LH
Year1995
ConditionUsed
Stock NumberGOD18012016-002