TEGAL 901 N°2

Wafer Size: 6 inch

TEGAL 901 DRY ETCH Poly/SiNSiC

Gases used;



SF6-N2-CHF3-He-O2



Mass flow  UNIT UFC1100A

tegal2

O2          50sccm

CHF3     50sccm

CF4        50sccm

SF6         100sccm

N2          225sccm



Pompa da vuoto 60L/min



Tegal2

Transport Endunit Board: 99-247-XXX

Transport Endunits: CW1078-A01XX

RF generator: ACG10

Display Assembly CMXXXX-002XX

Terminal Assembly 80-055-105 (non sono sicuro)

Clean Channel Installed