Hirata G450 Sorter 3 Port
Hirata G450 Sorter 3 Port
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Description
Still installed in Nano Research Laboratory
Hirata Equipment Front End Module is located in front of the process equipment that processes wafers. The Equipment Front End Module passes wafers between the FOUP (pods) and the process equipment and the sorter transfers wafers in a clean environment.
Hirata Equipment Front End Module is located in front of the process equipment that processes wafers. The Equipment Front End Module passes wafers between the FOUP (pods) and the process equipment and the sorter transfers wafers in a clean environment.
Specifications
| Manufacturer | Hirata |
| Model | KWS450-3180-VL-SL-001 |
| Year | 2011 |
| Condition | Used |
| Stock Number | NY001 |