Brooks G450 Edge inspection Tool
Brooks G450 Edge inspection Tool
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Description
Still installed in Laboratory
The Edge Inspection System BevelCam MC 450 is a tool for the automated, camera based inspection of the edge region of 450 mm wafers. It allows obtaining dark field as well as bright field
The Edge Inspection System BevelCam MC 450 is a tool for the automated, camera based inspection of the edge region of 450 mm wafers. It allows obtaining dark field as well as bright field
Specifications
| Manufacturer | Brooks |
| Model | G450 |
| Year | 2012 |
| Condition | Used |
| Stock Number | NY003 |