Mitsui Shibaura CDE8 DRY Etch 8 Inch

Still in FAB
With SMIF Loader
The Equipment includes -Main Body, Controller, CRT and Keyboard
Wafer Size 200mm
Gas System
5 MFC Tylan FC-2900
CF4, C12, N2, O2, NF3
Quartz Tube Protection
Ceramic Tube
Electrostatic chuck.
Chiller Neslab HX-75
Power Source 200V- 3PH , 14KVA
Configuration:
Through the Wall
SUS front Panel
Ni Coated Al side Panel
Pump Interface
Edwards EH250 Roots Blower/Edwards Dry Pump