STS 320PC RIE Etch Tool

STS Systems


Model 
320PC


Controller Type 
PC Controller Type


End Point Detection 
2ea Verity End Point Detectors


Number of Gas Inputs 
Eight Gas


Other Information 


·         Pentium II PC Based Control System

·         CES-GSW-CONFIG Software Upgrade

Enables Gas Line Configuration Change Capability
CD-RW ROM Drive
3.5” Floppy Disk Drive
Datalog Version 3.7.13
MAGNAVOX PHILIPS MB7000T001 Color Monitor
XEROX XK35c Color Printer

·         343mm (i.d.) X 144mm (h) Aluminum Process Chamber:

·         300mm (dia.) Wafer Platen

·         Gas Box with 8ea MFC Gas Delivery Channels:

·         TYLAN FC-280 Mass Flow Controllers

Plumbed for O2/CHF3, Cl2, N2, CF4, Ar, BCl3, SF6 & XeF2
Gas System Can be Retrofitted to Buyer Specification

·         STS Automatic Pressure Control System

·         STS PC320 RF Matching Unit

·         STS A.M.C.1A RF Automatch Module

·         STS E.P.D.1 End Point Detection Module

·         2ea STS P.F.C.1A RF Power/Gas Flow Modules

·         ADVANCED ENERGY RFX-600 13.56MHz RF Generator

·         VERITY EP200Mmd End Point Detector Monochrometer

·         VERITY EP200Msd End Point Detector Monochrometer

·         PFEIFFER BALZERS TPH-330 Turbo Pump

·         PFEIFFER BALZERS TCP-310 Turbo Pump Controller

·         EBARA 40X20 Dry Vacuum Pump with Exhaust Filter

·         NESLAB RTE-110 Recirculating Water Chiller

·         Operation and Maintenance Manual