ADE Episcan 1000 FT-IR
ADE Episcan 1000 FT-IR
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Description
Measurement of Epi Films <25µ
ON-LINE TECHNOLOGIES 2110 Spectrometer Head
IRVINE OPTICAL Nanoloader II Dual Cassette Wafer Handler
ADE ACS Controller
Windows NT Operating System
Wafer Mapping
Scanning Stage
cassette to Cassette
100mm to 200mm wafer size.
ON-LINE TECHNOLOGIES 2110 Spectrometer Head
IRVINE OPTICAL Nanoloader II Dual Cassette Wafer Handler
ADE ACS Controller
Windows NT Operating System
Wafer Mapping
Scanning Stage
cassette to Cassette
100mm to 200mm wafer size.
Specifications
| Manufacturer | ADE |
| Model | Episcan 1000 |
| Year | 2000 |
| Condition | Used |
| Stock Number | 110263.0 |