MACTRONIX UKA-650 Wafer Transfer Tool

Wafer Transfer Tool - Eureka III Sr. for 150mm Wafers





Manufacturer
Mactronix


Model
UKA-650


Description
Automatic Wafer Transfer Station


Other Information


Transfers Wafers Between one 25-slot Carrier and One 50 Slot Quartz Boat
Carriers/Boats can be Plastic, Teflon, Quartz, Silicon Carbide, Polysilicon and Metal
Air Operated
Minimized Wafer Contact
Preserved Flat Alignment
Hard Black Anodized Frame
Retainers Default to Closed Position to Prevent Dropping Wafers in the Event of Air Pressure Loss
Vacuum Sensors
Pressure: 70 to 90 PSI C.D.A. or N2
Vacuum: 20"-22" Hg




Exterior Dimensions






  Width
8.200  in  (20.8 cm)


  Depth
12.200  in  (31.0 cm)


  Height
26.300  in  (66.8 cm)