AVIZA High Temp Furnace VTR 7000 x 4

General
? VFA8 & 11 – High Temperature Furnaces. Maximum temperature 1300°C.
? VFA9 & 10 – Mid Temperature furnaces. Maximum temperature 1100°C.
? All fitted with a UPS
o VFA8 & 9 with Matrix UPS 3000, battery type and
o VFA10 & 11 with Levitron U3000-ONL
? All fitted with 6 position Carousels and LPT2200 Asyst Loaders.
? All fitted with External Torches. Hydrogen connected to the centre port and Oxygen connected to the side port.
? CDA supply pressure – 80 psi
? Extract – 200 to 400 cfm
? Process Cooling Water Flow – 2 to 5 gpm
? Process Vacuum – 20”