LAM 4520i
LAM 4520i
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Description
LAM 4520i Oxide Etcher
Envision Software, ESC, Turbo pump, DTCU, etc
Software : E1.6./002
ESC : Quel Type : 839-440 462-508
Loader (Hine 38) : 853-012500-002-E-3117
Computer type : WINDOWS 10
Orbital Welded gas box :853-024 401-181
Turbo pump / turbo Controller: TC440 OSAKA VACUM
Cool down (He) : No Advant cooling system
Specifications
Manufacturer | LAM |
Model | 4520i |
Condition | Used |
Stock Number | BM3746 |