1998 Hitachi S 5000 Field Emission Scanning Electron Microscope

- Ultra High Resolution

- Accelerating Voltage: 30 kV

- Magnification: 500,000x

Performance

- Image Resolution: 0.6 nm (at 30 kV),3.5 nm (at 1 kV) in secondary electron image

Magnification

- Low mag mode: x30 ~ x500

- High mag mode: x250 ~ x800,000

Electron Optics

- Electron Gun: Cold field emission source

- Accelerating Voltage: 0.5 ~ 30 kV (0.1 kV/step)

- Lens System: 3 stage electromagnetic stage

- Objective Operture:4 openings, selectable and alignable from outside of vacuum, anticontamination heater built in

- Stigmator: Octapole electromagnetic type (X, Y)

- Scanning Coil: 2 stage electromagnetic

Specimen Stage

- System: side entry type

- Motion:

X = +/- 3.5 mm (continuous)

Y = +/- 2 mm (continuous)

Tilt = +/- 40 Degrees (continuous)

Tilt range is restricted by optional specimen holders and optional detectors

- Specimen Size: 9.5 mm x 5 mm x 2.4 mm (h) for standard holder, 20 mm x 6 mm x 2.4 mm (h) (maximum) for larger specimen holder

Specimen Exchange: Airlock type with prepumping

Display System

- Imaging Signal: Secondary electron image Back scatted electron image (option), X-ray image option

- Scan Model: Normal scan, reduced area, line scan, photos scan, spot position, analysis scan, dual mag/split screen, oblique

- CRT: 12 inch monitor for viewing x 2 sets, (12 inch color monitor at option), 7 inch photo recording/ultra high resolution monitor x 1 set

- Frame Memory: 1, 024 x 1,024 pixel memory x 2 sets for slow scan image (4-split screen image can be recorded), 512 x 512 pixel x 1 set for viewing

- Image Processing: Auto image brightness and contrast, gamma control, dynamic stigmator monitor, auto sigmator, dynamic focus, auto focus

- Scan Speed: TV, 0.3, 2, 10 (9), 20 (25) s/frame for viewing, 40 (35), 80 (100), 160, 320 s/frame for recording, ( ): for 60 Hz line frequency operation

- Electrical Image Shift: +/- 3 μm

- Auto Data Display: Film number, accelerating voltage, micron bar, micron scale, magnification, and date are printed on film automatically

Vacuum System

- Vacuum Pumps:

IP1: 60 1/s

IP2: 20 1/s

IP3: 20 1/s

TMP: 340 1/s

RP: 140 1/min (168 1/min) x 2 sets, ( ): for 60 Hz line frequency operation

Security

- The instrument is protected against power and vacuum failures

Standard Equipment

- Column (x1)

- Display unit (x1)

- Power supply (x1)

- S-5080 Camera (x1)

- Air compressor (x1)

- Rotary pumps (x2)

- Standard tool (1 set)

- Spares and Consumables (1 set)

- Instruction manual (x1)

- Auto transformer (x1)

Dimensions and Weight:

- Column: 89(w) x 103(d) x 160(h) cm, 385 kg

- Display: 110(w) x 90 (d) x 116 (h) cm, 235 kg

- Power Supply: 54(w) x 63(d) x 150(h) cm, 215kg (Ion pump power supply, TMP power supply, stage control power supply, lens power supply)

Rotary Pump: 54(w) x 22(d) x 41(h) cm, 32 kg x 2 sets

Weight: 20(w) x 18(d) x 16(h) cm, 40 kg

Air Compressor: 40(w) x 23(d) x 55(h) cm, 18 kg

Auto Transformer: 33(w) x 35(d) x 38(h) cm, 72 kg

1998 Vintage