2005 UNAXIS CLC200 PVD Sputter
2005 UNAXIS CLC200 PVD Sputter
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Description
- Number of Chambers: 6
- Accessories: We sell the whole tool with all accessories
- CE Marked: YES
- Year of Manufacture: 2005
- Condition: Excellent
Chambers:
- PM2 is a clean chamber an is RF Supplied
- PM4 is RF and DC Power Supplied
- PM1, PM3, PM5 and PM6 is DC power supplied
The exact tool model is specific defined as: Unaxis CLN200-1. In the middle of the system you will find the transport module MX 800 with a MagnaTran MAG 7. A so called `Toplinger` and two cassette stations VCE6 are further components.
The tool has 6 process chambers
- One (P2) is a etch chamber (SEQ151)
- The other modules (P1,P3,P4, P5 and P6) are PVD modules (ARQ151)
Specifications
Manufacturer | UNAXIS |
Model | CLC200 PVD Sputter |
Year | 2005 |
Condition | Used |
Stock Number | Tara-128 |
Wafer Size | 200mm |