2005 UNAXIS CLC200 PVD Sputter

2005 UNAXIS CLC200 PVD Sputter

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Description


  • Number of Chambers: 6
  • Accessories: We sell the whole tool with all accessories
  • CE Marked: YES
  • Year of Manufacture: 2005
  • Condition: Excellent


Chambers:

  • PM2 is a clean chamber an is RF Supplied
  • PM4 is RF and DC Power Supplied
  • PM1, PM3, PM5 and PM6 is DC power supplied


The exact tool model is specific defined as: Unaxis CLN200-1. In the middle of the system you will find the transport module MX 800 with a MagnaTran MAG 7. A so called `Toplinger` and two cassette stations VCE6 are further components.

 

The tool has 6 process chambers

  • One (P2) is a etch chamber (SEQ151)
  • The other modules (P1,P3,P4, P5 and P6) are PVD modules (ARQ151)  




Specifications

ManufacturerUNAXIS
ModelCLC200 PVD Sputter
Year2005
ConditionUsed
Stock NumberTara-128
Wafer Size200mm