1996 AMAT P5000

Wafer Size Range

Minimum

150 mm

Maximum

150 mm

Set Size

150 mm

Number of Chambers

3

Year of Manufacture

1996

Condition

Very Good

CHAMBER A

x

Universal CVD

Teos

CHAMBER B

x

Universal CVD

Teos

CHAMBER D

x

Universal CVD

Teos

Tool is sold with three chambers and was used in cleanroom until August 2023