1996 Gasonics L3510
1996 Gasonics L3510
Contact us for price
orCall +353 (0) 87 192 1110
Description
GASONIC L3510 Single Wafer Downstream
Photoresist Asher
8” configured (can change to 6” )
Quartz Plasma Tube and Baffles
ASTEX Microwave 1.2kw
Temperature Controlled
Wafer Cooled
Aluminum Process Chamber
Robotic Pick and Place Wafer Handler ( KORO )
Fixed Position Single Cassette Station
Post Process Cooling Station
Downstream End Point Detection
SEMI SECS ⅱ Software
2 Gas Mass Flow Controller : O2 4slpm , N2 2slpm
System Power : 208 VAC , 60 A, 3 Phase, 50/60Hz
Specifications
Manufacturer | Gasonics |
Model | L3510 |
Year | 1996 |
Condition | Used |
Stock Number | BM3037 |