Novellus Concept 2
Novellus Concept 2
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orCall +353 (0) 87 192 1110
Description
Working condition
200MM, PVD SYSTEM
(1) DEGAS CHAMBER
(1) DAMACLEAN ETCH MODULE
(1) TA PVD CHAMBER
(1) CU HCM PVD CHAMBER
(1) CVD TI SIN CHAMBER
(1) ORIENTER
Numerous quartz pieces are included with the sale
It is set up to do dual damascene copper interconnects
Specifications
Manufacturer | Novellus |
Model | Concept 2 |
Condition | Used |
Stock Number | BM2982 |