AMAT CENTURA 5200 MXP Plus etch system
AMAT CENTURA 5200 MXP Plus etch system
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Description
AMAT CENTURA 5200 for sale
Included:
- main frame,
- one MXP+ chamber body,
- power AC rack,
- Controllers
Chillers and vacuum pumps not included
Specifications
Manufacturer | AMAT |
Model | CENTURA 5200 |
Condition | Used |
Stock Number | GOD16032023 |
WAFER SIZE | 200mm |