1997 AMAT Centura HTF - 3 Chamber Epi tool
1997 AMAT Centura HTF - 3 Chamber Epi tool
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Description
AS-IS AMAT Centura HTF 3ch Epi system, ATM
It was running wafers and is in very good condition
‐ 200mm
‐ Centura 5200 HTF Toxic Epi mainframe
- 480V/60Hz/600A
- Wide Body ENP loadlocks
‐ Wafer mapping
‐ HP robot
‐ Remote Centerfinding
‐ Epi chamber RP Position: A, B, C
* R3.4 rotation assy
* Variable Speed Blower
‐ Single slot non-contact cooldown chamber, position F
‐ Legacy Gas Panel (USED)
* H2 Slit - 20 SLM
* H2 Main - 100 SLM
* HCL - 1 SLM
* DCS - 1 SLM (Not Used, was RP tool)
* MixDop - 300 SCCM
* TCS - 30 SLM
* Direct Dop - 500 SCCM
Specifications
Manufacturer | AMAT |
Model | Centura HTF - 3 Chamber Epi tool |
Year | 1997 |
Condition | Used |
Stock Number | BM2681 |