AMAT AKT GEN 6 PECVD CHAMBER
AMAT AKT GEN 6 PECVD CHAMBER
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Description
Chambers are unused and were never commissioned.
Susceptor, gas shower and other chamber kitting not installed.
Substrate Size: 1500 mm x 1850 mm
Specifications
| Manufacturer | AMAT |
| Model | AKT GEN 6 PECVD CHAMBER |
| Condition | New |
| Stock Number | GOD23082019720221954 |