AMAT Centura HP PVD
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Description
AMAT Centura 5200
Used known working
200mm
2 x standard PVD (Ti&Al) chambers,
1 x Preclean II,
1 x Orienter/Degas
1 x Cool Down
1 x CTI 9600 cryo compressor
1 x heat exchanger
1 x QDP 40
1 x QDP 40 with 250QMB blower
Many spares
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Specifications
Manufacturer | AMAT |
Model | Centura HP PVD |
Condition | Used |
Stock Number | GOD101020222 |
WAFER SIZE | 200mm |