AMAT P5000 Mark II-J
AMAT P5000 Mark II-J
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Description
150 mm AMAT P5000 with 3 Delta DLH chambers configured for SiH4 based PECVD oxide and nitride dep processes
Specifications
Manufacturer | AMAT |
Model | P5000 Mark II-J |
Condition | Used |
Stock Number | GOD17062022P5K |
WAFER SIZE | 150mm |