2004 TEL Act 12

2004 TEL Act 12

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Description

Main Controller Type: NA                            

Wafer Flow: Right to Left                            

Configuration                     

2) Missing Parts List: No CSE

                                                      

    A. 3-1 DEV Unit                                                  

         - Spin Chuck                                                  

        - Wind Velocity Sensor                                                

                                                      

    B. 3-2 DEV Unit                                                  

        - Spin Chuck                                                   

        - ARM#2(Rinse) Motor Driver                                                 

        - Temp Sensor Fail                                                     

        - Spin Unit Solenoid Valve Ass’y                                              

        - Develop Drain Fitting                                                

                                           

    C. Coater 1 Unit                                                  

        - Spin Chuck                                                   

        - Catch-Cup Ass’y                                                       

        - ARM#1 Motor Driver                                                 

        - Nozzle Changer Motor Driver                                                

        - EBR(Side Rinse Arm) Motor Cable Ass’y                                                       

        - EBR(Side Rinse Arm) Home Sensor                                                  

        - Spin Unit Solenoid Valve Ass’y                                              

        - Spin Chuck Vacuum Solenoid Valve Ass’y                                                     

                                                      

     D. Coater 2 Unit                                                 

        - Spin Chuck                                                   

        - Catch-Cup Ass’y                                                       

        - ARM#1 Home Sensor

                                                      

3) Etc.

     1. Main Body Rear Cover

     2. Coater Unit Exhaust SUS Pipe

     3. Coater Unit Auto Damper Ass’y

     4. Rear Under Exhaust SUS Pipe

Specifications

ManufacturerTEL
ModelAct 12
Year2004
ConditionUsed
Stock NumberBM2219