AMAT P5000 2 chamber nitride PECVD tool
AMAT P5000 2 chamber nitride PECVD tool
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Description
as is tool,
RF Generators Missing, we can supply the RF Generators within the asking price (as is)
Gasses: {SiH4, N2O, NH3, N2, NF3} + {SiH4, N2}
Updated 27th May 2022:
I inspect the P5000 today and I take pictures and video
The supplier bought this p5000 in 2011 from Japan
I can’t find big missing parts but this tool has several missing parts
Missing parts: Video B/D, chamber #A Gas line with MFC, air valve, Chamber #A, #B Chamber signal cable and AMAT-1
WDB is old version, I think you need change WDB,, (I have one new type ^^ )
Monitor also old version .
They want to sell as-is condition.
of course they will give you 2 generator later.
Specifications
Manufacturer | AMAT |
Model | P5000 |
Condition | Used |
Stock Number | GOD09052022 |