EDWARDS IL600N 353cfm Dry Pump

Vacuum pump and blower, code# NRB4-47-945, gate valve, ultimate vacuum 1.5 x 10-3 torr, 353cfm@ 60hzThe BOC Edwards iL600N iLN 600N Semiconductor Dry Vacuum Pump System Rebuilt This Edwards iL600N iL 600N system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chambers. This ensures a clean pumping system without back-migration of oil into the system being evacuated.The iL600N Series Drypumps have been specifically designed to provide reliable operation over a wide range of applications. The unique cantilevered shaft design eliminates bearings from the high vacuum end of the dry pump and booster. These Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.The Edwards iL600N iL 600N Series operate under the most arduous conditions in the worlds top wafer fab manufacturing plants and have been proven to require zero periodic maintenance. The iL600N series provide applications specific to the semiconductor fabrication processes.iL600N Series pumps feature shaft seal nitrogen purge capability ideal for light duty applications such as dielectric etch. The iL600N system has an LCDP70 dry pump, with an LCMB600 mechanical booster pump fitted to the inlet of the LCDP pump. This system is fully enclosed, and includes seismic restraints. A PDT, available as an accessory, enables you to manually operate the iL system and to display its status.Features & BenefitsLow cost of ownershipNo NitrogenLow PowerLow Consumption of Cooling WaterSimple controlSemiconductor Fab Applications Include:Load LockTransfer ChambersPVD SputteringAshing/PR StripDielectric EtchImplant Beam/Target