DNS / DAINIPPON 80B Coater Developer

DNS / DAINIPPON 80B Coater Developer

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Description

Working condition, no missing parts.


System configuration:


Coater Side


  • 3-Coat (1-BARC, 2-Resist)
  • 2-Nozzle BARC, 4-Nozzle Resist
  • 2-LPAH (Low Pressure HMDS)
  • 8-Soft Bake Hot Plates (250℃)
  • 6-Chill Plate



Developer Side


  • 3-Develop
  • 2-SI Nozzle + Prewet
  • 2-EEW (Optical Edge Exposure)
  • 6-PEB Hot Plates
  • 2-Chill Plate

Specifications

ManufacturerDNS / DAINIPPON
Model80B Coater Developer
ConditionUsed
Stock NumberGOD25012022
WAFER SIZE200mm