DNS / DAINIPPON 80B Coater Developer
DNS / DAINIPPON 80B Coater Developer
Contact us for price
orCall +353 (0) 87 192 1110
Description
Working condition, no missing parts.
System configuration:
Coater Side
- 3-Coat (1-BARC, 2-Resist)
- 2-Nozzle BARC, 4-Nozzle Resist
- 2-LPAH (Low Pressure HMDS)
- 8-Soft Bake Hot Plates (250℃)
- 6-Chill Plate
Developer Side
- 3-Develop
- 2-SI Nozzle + Prewet
- 2-EEW (Optical Edge Exposure)
- 6-PEB Hot Plates
- 2-Chill Plate
Specifications
Manufacturer | DNS / DAINIPPON |
Model | 80B Coater Developer |
Condition | Used |
Stock Number | GOD25012022 |
WAFER SIZE | 200mm |