2005 KLA TENCOR eS32
2005 KLA TENCOR eS32
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Description
Wafer Mask Inspection
Parts Machine
KLA ES32 (1) - Stage, electron source, feed throughs included
KLA ES32 (2) - Stage, electron source, pre-aligner, feed throughs, stage lasers included
Scan amp boards are missing on both tools
Specifications
Manufacturer | KLA TENCOR |
Model | eS32 |
Year | 2005 |
Condition | Used |
Stock Number | BM1197 |