2005 KLA TENCOR eS32

2005 KLA TENCOR eS32

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Description

Wafer Mask Inspection

Parts Machine

KLA ES32 (1) - Stage, electron source, feed throughs included

KLA ES32 (2) - Stage, electron source, pre-aligner, feed throughs, stage lasers included


Scan amp boards are missing on both tools

Specifications

ManufacturerKLA TENCOR
ModeleS32
Year2005
ConditionUsed
Stock NumberBM1197