1995 TEL Mark-8 CLEAN Track System 2-Coater/2-Developer
1995 TEL Mark-8 CLEAN Track System 2-Coater/2-Developer
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Description
Missing parts:
FC-9821Ke Controller
Robotic arm assembly and board
ADH/Adhesion Unit
4x LHP units
2x Cool Plate units
WDS
4x RKC Controllers
a-1. Wafer Size: 200mm Dual Block System
b-1. Wafer Flow: Right to Left
CSB unit is in right side and interface station unit is in left side
c-1. Process Block: 2ea.
d-1. Block #1
aa. TEL Clean Track Mark 8 FC-9821Ke Controller: Missing
bb. Stage/Indexer: SMIF/Cassette Station
cc. CSA/Cassette Station Arm: 1ea.
e-1. Block #2
Normal Photo Resist Coat 2-1, 2-2 Units:
- 2ea. normal photo resist dispense nozzles per coat
- Total 2 normal photo resist dispense nozzles and 2 RRC resist pump per coat unit
- 1-side rinse nozzle (programmable side rinse EBR) for normal coat unit
- Dual back rinse nozzle
- Installed photo resist temperature control
- Installed motor flange temperature control
- Photo resist drain type: Direct gravity drain type
- Photo resist bottle quantity: 2 spaces
- Installed photo resist auto exchange
- Installed dummy dispense system
- Cup type: PP for upper cup and inner cup
- Auto damper: Cylinder only
f-1. Block #3
aa. Develop 3-1, 3-2 units:
- Single E2 nozzle for develop unit
- Dual top rinse nozzle for develop unit
- Installed back rinse nozzles for develop unit
- Installed develop temperature control
- Installed motor flange temperature control
- Drain type: Direct gravity drain type
- Installed auto damper
- Installed auto dummy dispense system
- Cup type: Stainless steel for upper cup and PP for inner cup
bb. PRA/Process Block Robotics Arm: 2ea/Missing assembly with board
cc. ADH/Adhesion Unit: 2ea/missing
dd. LHP/Low Temperature Oven Unit: 2ea/4ea missing
ee. COL/Cool Plate Unit: 4ea/2ea missing
ff. WDS/Washing Disk Stock: Missing
g-1. THC/Temperature and Humidity Controller: 1ea/ TEL OEM 2-CUP Shinwa T&H
Missing 4ea RKC controller
h-1. External Chemical Supply System:
aa. 1st. Section: Solvent Supply System
- Solvent Chemical type: 1ea.
- Chemical Center Supply System (CCSS) with 2 of 3liter Teflon Buffer Tank
- Tank Type: 2-Buffer tank (3liter tank, Teflon) to cover two coat units.
bb. 2nd. Section: Develop Supply System
- Develop Chemical type: 1ea.
- Chemical Center Supply System (CCSS) with 2 of 3liter Teflon Buffer Tank
- Tank Type: 2-Buffer tank (3liter tank, Teflon) to cover two DEV units.
i-1. HMDS Supply System for 2 AD Unit
- Chemical Type: 1ea
- Chemical 1/4gal. Bottle with 1L Buffer Tank
- Tank Auto Switch-off/Exchange: N/A
j-1. TEL OEM SMC Multi Controller: 1ea. @ rear main body
k-1. Power Transformer AC Cabinet: 208Vac, 3-Phase, 50/60Hz
4. Sales Condition
As-is/Where-is
Specifications
Manufacturer | TEL |
Model | Mark-8 CLEAN Track System 2-Coater/2-Developer |
Year | 1995 |
Condition | Used |
Stock Number | BM1192 |