1995 AMAT CENTURA EPI P5200 HT

• HT Platform (main frame with door for safety and reduced noise, upper frame for Blower and Heat exchanger)
• Wafer size: 200mm
• 2 epitaxial/Polycide chambers (A,D)
• 1 cooling station
• 4 Edwards pumping systems (Edwards iXH-1220HTX, QDP80+QMB250, QDP40, other QDP + roots)
• process gas (SiH4; SiH2Cl2 ; TiCl4; GeH4; SiH3CH3; B2H6; PH3; HCl; CH4; H2.)
• Vintage 1995

 Condition: 

• Complete
• Functional when it was stopped
• Requires reconditioning/cleanning
• Gas purged
• The pumping system needs to be refurbished
•  Sold as-is where is