2012 Mechatronic mWS200/300t Wafer Sorter

Mechatronic Sorter for 200 and 300mm

With Bernoulli Aligner for 8 and 12 inch and IOSS Camera.

And greenlight inspection.

With 4 Synfoniy 300mm Loadports, 2 on the front side and 2 on the backside.

Cassette to Cassette: YES

Other Information

Tool was in production until 19 October 2021

Condition: Excellent

Year of Manufacture: 2012

CE Marked: YES

TECHNICAL SPEC

• Wafer sizes：200mm（8”）and 300mm（12”）

• Sorting of two wafer sizes in one machine

• Handling of standard，TAIKO，thin and warped wafers

• Optimized footprint

• Highest product and operator safety

• High throughput（up to 201 wafers / hour）

• End - effectors with mapping function

• Wafer flipping function

• Green light visual inspection via joystick and defect marking on touch panel

• Wafer - ID reader for barcode，OCR，data matrix code，T7 optional

• RFID reader for FOUP - / cassette - ID optional

• SECS / GEM optional

• Integrated FFU for better cleanroom class optional

• UPS（uninterruptible power supply）optional

• Cleanroom class 5（ISO EN 14 644 - 1）

• CE certificated

• SEMI standards compliant