2012 Mechatronic mWS200/300t Wafer Sorter

2012 Mechatronic mWS200/300t Wafer Sorter

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Description

Mechatronic Sorter for 200 and 300mm

With Bernoulli Aligner for 8 and 12 inch and IOSS Camera.

And greenlight inspection.

With 4 Synfoniy 300mm Loadports, 2 on the front side and 2 on the backside.


Cassette to Cassette: YES

Other Information

Tool was in production until 19 October 2021

Condition: Excellent

Year of Manufacture: 2012

CE Marked: YES


TECHNICAL SPEC


• Wafer sizes:200mm(8”)and 300mm(12”)
• Sorting of two wafer sizes in one machine
• Handling of standard,TAIKO,thin and warped wafers
• Optimized footprint
• Highest product and operator safety
• High throughput(up to 201 wafers / hour)
• End - effectors with mapping function
• Wafer flipping function
• Green light visual inspection via joystick and defect marking on touch panel
• Wafer - ID reader for barcode,OCR,data matrix code,T7 optional
• RFID reader for FOUP - / cassette - ID optional
• SECS / GEM optional
• Integrated FFU for better cleanroom class optional
• UPS(uninterruptible power supply)optional
• Cleanroom class 5(ISO EN 14 644 - 1)
• CE certificated
• SEMI standards compliant 



Specifications

ManufacturerMechatronic
ModelmWS200/300t Wafer Sorter
Year2012
ConditionUsed
Stock NumberTara-123
WAFER SIZESet for 300mm, Can do 200mm also